Equipment
Dortmund Description: Reactive Ion Etching (RIE) Features: Chlorine chamber: SF 6 , Cl 2 , CHF 4 , SiCl 4 , N2; Fluorine chamber: SF 6 , O 2 , Ar, CHF 3 , N 2 Oxford PlasmaLab 80Plus © LS MNE / TU Dortmund [...] Structure widths down to 0,6 µm on 4 inch substrates Suess Microtec MA4 © LS MNE / TU Dortmund Description: UV light exposure system, mask aligner Features: Structure widths down to 0,6 µm on 4 inch substrates [...] Cryogenic Probe Station Features: Closed Cycle, Helium Compressor, Beryllium DC probe Tips Everbeing BD-6 Probe Station © MNE / TU Dortmund Description: RF Wafer Prober Features: RF Measurements up to 40GHz …
